| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c89cdb408a39eb40fc69d27627685b9e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-1085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-402
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2257-404
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2259-40086 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B21-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J29-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B21-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-81 |
| filingDate |
1982-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_975dfb4a45d3a5c2f10a1fb4772c47a9 |
| publicationDate |
1984-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-3226840-A1 |
| titleOfInvention |
METHOD FOR SEPARATING AND RECYCLING NO (DOWN ARROW) X (DOWN ARROW) GAS SHARES BY ADDING AND DESORPING MOLSIEB |
| abstract |
The invention relates to a method for producing thin, optically transparent and electrically conductive Me tall oxide layers by reactive evaporation of metal alloys in a vacuum in the presence of oxygen and optionally also a plasma. The process enables the simple production of thin metal oxide layers that contain two or more metals, such as a layer of indium tin oxide (ITO), which have a very high light transmission and a very low resistance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3805734-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0393610-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0393610-A3 |
| priorityDate |
1982-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |