| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-124
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-141 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-039 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 |
| filingDate |
1978-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1984-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1984-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2847764-C2 |
| titleOfInvention |
Photosensitive material and process for forming ultrafine patterns |
| priorityDate |
1977-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |