Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-974 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-906 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02043 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
filingDate |
1978-05-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecddcb01dbfbd7687040c78a8d009aca |
publicationDate |
1978-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-2820608-A1 |
titleOfInvention |
CLEANING PROCEDURES FOR POLISHED SEMI-CONDUCTOR SURFACES |
priorityDate |
1977-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |