| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_634538388f2dd27ea0a8bc2a2032c517 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 |
| filingDate |
1978-04-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d1b3bff88edbda550034836b044faf7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_22dd07dad2aae54003e379f95d8a8434
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4b67cfa50a09aa715041d689384e7d1 |
| publicationDate |
1978-11-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2817256-A1 |
| titleOfInvention |
PROCESS FOR DEVELOPMENT OF A AREA COVERED WITH PHOTO ETCH |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5112517-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0410333-A1 |
| priorityDate |
1977-05-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |