| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B2367-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B26D7-1827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B43-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B32B27-36 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B26D7-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-74 |
| filingDate |
1977-11-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1982-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1982-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2752870-C2 |
| titleOfInvention |
Method for cutting photoresist films, which are supported by a cover sheet as a carrier, applied to a substrate |
| priorityDate |
1976-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |