http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2746224-A1

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-339
filingDate 1977-10-14-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4937e5df375305349c52d259d49d0558
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18ab3d609e572fb71849a21f882b7c8e
publicationDate 1978-10-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-2746224-A1
titleOfInvention METHOD OF MANUFACTURING A TWO-PHASE CHARGE SHIFTING ARRANGEMENT
abstract The device has a buried channel and implanted barriers. After production of a first gate oxide layer and a first Sigate plane, barriers are self-adjustingly implanted through spacings between these gate electrodes. A second gate oxide layer and a second Si-gate are then produced over the spacings in the first plane, so that a uniform thin gate oxide layer lies between the Si-gate of the two planes. Si-gates of the second plane, centred over the spacings in the first Si-gate plane, partly overlap the first plane gates.
priorityDate 1976-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.