http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2706519-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02043 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306 |
| filingDate | 1977-02-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ecddcb01dbfbd7687040c78a8d009aca |
| publicationDate | 1977-10-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-2706519-A1 |
| titleOfInvention | METHOD OF CLEANING THE SURFACE OF POLISHED SILICON PLATES |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0000701-A3 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0000701-A2 |
| priorityDate | 1976-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.