http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2522549-C3
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S359-90 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-001 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05K3-06 |
| filingDate | 1975-05-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1979-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 1979-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-2522549-C3 |
| titleOfInvention | Method for transferring a halftone exposure pattern recorded in photoresist into a surface relief pattern of a substrate surface |
| priorityDate | 1974-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 16.