Predicate |
Object |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-118 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02543 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-246 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2233 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223 |
filingDate |
1975-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
1980-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
1980-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-2506457-C3 |
titleOfInvention |
Process for the production of a silicate covering layer on a semiconductor wafer or on a layer thereon |
priorityDate |
1975-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |