| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02395
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02546
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02543
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02126
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-118
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02639 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-246
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2233
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-223 |
| filingDate |
1975-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1979-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2506457-B2 |
| titleOfInvention |
Process for the production of a silicate cover layer on a semiconductor wafer or on a layer on it |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3044958-A1 |
| priorityDate |
1975-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |