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filingDate 1973-07-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 1975-02-06-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-2336517-A1
titleOfInvention RADIATION-SENSITIVE MATERIAL
abstract Electron resist materials consist of a linear (meth)acrylate polymer having 3-20C side-chains wich contain double-bonded end-gps. The materials have good adhesion, resistance to certain media, high dissoln. Capacity and high sensitivity at low film thicknesses for electron irradn.
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