http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2328589-C3
Outgoing Links
Predicate | Object |
---|---|
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R31-2637 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
filingDate | 1973-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 1981-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 1981-10-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-2328589-C3 |
titleOfInvention | Arrangement for non-destructive measurement of the local course of the carrier life of a semiconductor wafer |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004032032-A1 |
priorityDate | 1973-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
---|---|
isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 |
Total number of triples: 13.