| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2d935a2fd3e16d8e76f1d76a30aec0a3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
1973-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_380b232b7d0cd28ccf963c1ba2e3b566
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e44e09fab32f9c811e8d4b722a382df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_375717635144a18c4f02200cb0535677
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9daf034b17812f93c5091ed2a0f85ab3 |
| publicationDate |
1974-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2305188-A1 |
| titleOfInvention |
PROCESS FOR THE PRODUCTION OF POLISHED SEMI-CONDUCTOR SURFACES |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0008360-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-3545383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5226930-A |
| priorityDate |
1973-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |