| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-912
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-037 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26506
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-82285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0658
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-761 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-331
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-73
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-761
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-52
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-8228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-00 |
| filingDate |
1972-12-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70afa65a8553c289ebadc27df43905ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e8e26bdac36362eb94fb210a97f93d6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_546f073641c69832daa1d5aadb093299
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0293093df4fe09dd2fb989957770d172 |
| publicationDate |
1973-07-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-2262024-A1 |
| titleOfInvention |
METHOD FOR MANUFACTURING SEMI-CONDUCTOR COMPONENTS OR SEMICONDUCTOR CIRCUITS |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/SG-115526-A1 |
| priorityDate |
1971-12-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |