Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_917ee535f78fbfa93e9e73daf996ac11 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-152 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-229 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2958 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2956 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-406 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-404 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45512 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-403 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-405 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-401 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-225 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-408 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45593 |
classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-245 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-22 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C03C17-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
filingDate |
1971-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
1972-06-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-2140092-A1 |
titleOfInvention |
Method for applying thin layers to substrates and device for carrying out the method |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2908412-A1 |
priorityDate |
1970-12-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |