Predicate |
Object |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-38 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-308 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-72 |
filingDate |
1970-06-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate |
1971-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-2030013-A1 |
titleOfInvention |
Means for etching metals |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4211242-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0455574-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0739753-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-4031860-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19515394-C1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-5785840-A |
priorityDate |
1969-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |