| abstract |
A method for structuring surfaces of glass-like materials and modifications of the method are proposed, comprising the method steps of providing a semiconductor substrate (2), structuring with depressions (4), at least one surface of the semiconductor substrate, providing a substrate made of glass-like material (3), connecting of the semiconductor substrate with the substrate made of glass-like material, wherein a structured surface of the semiconductor substrate is brought together at least partially overlapping a surface of the glass-like substrate and the connected substrates are heated by annealing such that the glass-like material flows into the depressions of the structured surface of the semiconductor substrate takes place. The process variants are particularly suitable for the production of micro-optical lenses and micromechanical components, such as micro-relays or micro-valves. |