| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-0486 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05C9-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-04 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C9-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-08 |
| filingDate |
1999-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eea1e5458817074b5c96e799f2979a9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c0462c12f41aff68b639695e460ebb7 |
| publicationDate |
2000-10-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19952604-A1 |
| titleOfInvention |
Device for forming a coating film |
| abstract |
The invention relates to a device for forming a coating film, comprising DOLLAR A - a processing section (1) for applying a series of processing steps for forming a coating film on a substrate; and DOLLAR A - a common transfer mechanism (18) for transferring a substrate into the processing section (1), DOLLAR A, the processing section (19 having a cooling unit (24, 26) for cooling a substrate; DOLLAR A a coating unit (12, 13) for applying a coating solution containing a first solvent to a substrate for forming a coating film; DOLLAR A a processing unit (21) for converting the coating film formed in the coating unit into a gel-like film when the coating film is in a solid state DOLLAR A is a solvent exchange unit (11) for contacting a second solvent different in composition from the first solvent with the coating film for the first solvent contained in the coating film by the second To replace solvents; DOLLA R A is an aftertreatment unit (20) for heating and cooling the substrate in an atmosphere with low oxygen concentration, whereby the coating film is aftertreated or cured; and DOLLAR A a heating unit (19, 22) for heating or supplying heat to the coating film, which ... |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105377452-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105377452-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-520565-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/AT-520565-A5
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9962721-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014187600-A1 |
| priorityDate |
1998-11-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |