http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19952465-C1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0605 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-26 |
| filingDate | 1999-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2001-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cb3a25d3c7fd69769d0620a0b66537e1 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10507b1e723d159db6b7d66c7fa89db6 |
| publicationDate | 2001-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-19952465-C1 |
| titleOfInvention | Process for producing an adherent, diamond-like carbon layer on a substrate surface |
| abstract | A method is described for producing an adherent, amorphous hydrocarbon layer on a substrate surface by means of ion-assisted deposition, with a substrate electrode, the surface of which forms the substrate surface on which the a-C: H layer is deposited. DOLLAR A The invention is characterized in that, during the deposition process, the surface of the substrate electrode is at least temporarily cooled to temperatures below 203 K. |
| priorityDate | 1999-10-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 24.