| abstract |
A diazonaphthaquinone sulfonyl-substituted polymer suitable for use in a non-reflective coating for a semiconductor device, wherein the polymer is a poly (styrene-acrylate) polymer of formula (1): wherein R is hydrogen, a C 1 -C 6 alkyl, hydroxyl or hydroxymethyl group; x is a number from 1 to 5 and a: b: c: d is a molar ratio of 0, 1-0.9: 0.1-0.9: 0.1-0.9: 0.1-0, 9 stands. |