http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19938205-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-019 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0041 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P1-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01L9-0042 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01L9-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P1-02 |
| filingDate | 1999-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_64c9c759a8791ec3a52d14da6575cb10 |
| publicationDate | 2001-02-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-19938205-A1 |
| titleOfInvention | Sensor, in particular micromechanical sensor, and method for its production |
| abstract | The sensor (10) has a sensor element (12) which is connected to an opposite cover element (13) by means of a connecting means (15) with a hermetic seal. A gap (19) surrounding a sensor interior (16) and in which the connecting means (15) is located is formed in a connecting area (14) of the two opposite elements (12, 13). At least one stop means (22, 23) defining the height of the gap (19) is arranged between the sensor element (12) and the cover element (13). Before the two elements (12, 13) are connected in the gap (19), the connecting means (15) is advantageously offset in relation to a center line of the connecting region (14) in the direction of the stop means (23) adjacent to the sensor interior (16). At least one of the stop means (22, 23) and / or the element (12, 13) interacting with it preferably has at least one self-adjusting means (26). |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8421169-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10137749-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2259018-A1 |
| priorityDate | 1999-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23056 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419547247 |
Total number of triples: 22.