http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19934089-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_394e1eac0f43a87fa452f9d345ba37b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2671014bdeb0e8b9a54763692b7ddb8e |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-525 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76838 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76886 |
| classificationIPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-525 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
| filingDate | 1999-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44425d6ab153877a17187aa5426cbdc8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f6b00415a85fa19b140715246645528 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_26784bd6775182cf2e321acf561b7c67 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d6c88bb359b0cf452e87dfd4ec8da07e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ca7277d34195942a1791628584fd27cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28957a3ed4cd0bed12372c6c85ca3f03 |
| publicationDate | 2001-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-19934089-A1 |
| titleOfInvention | Process for creating electrically conductive areas in multi-component materials |
| abstract | The invention relates to a method for producing conductive or semiconducting regions in multicomponent semiconductors or insulators, in that at least one material component is completely or partially removed by interaction of the material with particle beams. The increase in the conductivity of the processed material areas is due to a higher conductivity of the remaining material than that of the starting material. The task was to create areas with higher conductivity in the multi-component starting material with the least possible technical and time expenditure as well as in any direction and geometry, which have no inhomogeneous edge areas, from which a disadvantageous instability with regard to the material properties and geometry can arise. In particular, very narrow and homogeneous, also three-dimensionally structurable, conductive tracks with constant stability should be able to be produced, the heat conduction properties of the material should have no influence on the technological generation process of these tracks. According to the invention, the bond between the material components to be extracted and the remaining components is broken non-thermally by particle radiation and without causing material heating. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007049225-A1 |
| priorityDate | 1999-07-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.