| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01G5-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01G5-16 |
| filingDate |
1999-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_50f22aca59ad9dff8acdfcfd85329e31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_433978d16e8fd293fc06c6fbdefdf642
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1488b33fa1045fde63dc519c44c0bc1d |
| publicationDate |
2000-08-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19903571-A1 |
| titleOfInvention |
Electrostatically tunable capacity and method of making the same |
| abstract |
An electrostatically tunable capacitance comprises a non-movable electrode and a movable electrode. The non-movable electrode is arranged in a depression in a first main surface of a substrate. The movable electrode is formed in a functional layer which is connected to the first substrate in a region which is essentially opposite to the depression in the substrate. The non-movable electrode is arranged in the recess of the substrate such that the non-movable electrode is spaced from the functional layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005026203-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-10145721-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102013018257-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102005026203-A1 |
| priorityDate |
1999-01-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |