| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d7576285d411d00c697e07270d2814a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_214f49374305638452ed94481d7c8a96 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S134-902 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02052 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B3-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
1998-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c985321652b390bc706da50550991a16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_eccbbd74f0b38bf037d988b42bddab4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5eb3d1f04d65ed0769a8c9d73f6da925
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0bb2f5e7316d5fa248a6fc491fda482b |
| publicationDate |
2002-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19855895-C2 |
| titleOfInvention |
Cleaning procedure using a hydrochloric acid / hydrogen peroxide mixture |
| priorityDate |
1997-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |