| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-4066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-2223
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2202 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-34 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N30-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N1-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
1998-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21e14939f03ad969532bc2207a53e21c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f7c1299fdde7a790e4cdb1256a92b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77d62656ee3c0193ec4a513bdd079316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5da9b8010224a1c918caa9b3bb350632 |
| publicationDate |
2004-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19804971-B4 |
| titleOfInvention |
Analysis method for water-soluble impurities in a clean room atmosphere in the production of semiconductor components and device for carrying out this method |
| abstract |
Analysis method for water-soluble impurities in a clean room for the production of semiconductor components with the following process steps: a) the temperature of the reference air is kept constant; b) condensation of the reference air to be analyzed and liquefaction of the water contained in the reference air; c) pressurizing the liquefied water drops and supplying the water drops to an analysis device; and d) Carrying out a qualitative and quantitative analysis using the analysis device. |
| priorityDate |
1997-05-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |