http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19734650-B4
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-30 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-30 |
filingDate | 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21c24f43d47c402684ec53bd9c7a79c4 |
publicationDate | 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | DE-19734650-B4 |
titleOfInvention | Device for emission of electromagnetic radiation by gas discharge, method for its production and use of the device |
abstract | Device for emitting electromagnetic radiation by gas discharge with A gas discharge space (2) filled with a gas and - means for effecting a gas discharge in the gas discharge space (2), wherein the gas discharge space (2) is formed as a recess in a substrate (1) and laterally bounded by the substrate (1), characterized in that the substrate (1) a Silicon substrate is. |
priorityDate | 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 23.