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classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J61-30
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J61-30
filingDate 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_21c24f43d47c402684ec53bd9c7a79c4
publicationDate 2007-06-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-19734650-B4
titleOfInvention Device for emission of electromagnetic radiation by gas discharge, method for its production and use of the device
abstract Device for emitting electromagnetic radiation by gas discharge with A gas discharge space (2) filled with a gas and - means for effecting a gas discharge in the gas discharge space (2), wherein the gas discharge space (2) is formed as a recess in a substrate (1) and laterally bounded by the substrate (1), characterized in that the substrate (1) a Silicon substrate is.
priorityDate 1997-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 23.