| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P70-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-549 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K50-81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-621
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-1884 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3213
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L51-52 |
| filingDate |
1997-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad7f97662de14cf2af6fbf08e318a161
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_787f7ebaad69da9f514afcd03eaf2ba8 |
| publicationDate |
1998-10-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19715048-A1 |
| titleOfInvention |
Process for structuring transparent, conductive layers |
| abstract |
The invention relates to a method for structuring a transparent or semi-transparent electroconductive oxidic layer on an insulating substrate in a reliable, cost-efficient, environmentally friendly manner involving a relatively small amount of equipment. According to the inventive method, the layer is brought into contact with the tip of a needle. Voltage is applied between the layer and the needle and the tip of the needle is guided along the layer surface according to a given model. A groove is made in the layer, leaving the substrate uncovered. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7648906-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9203029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1681726-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9583729-B2 |
| priorityDate |
1997-04-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |