| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31701 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-08 |
| filingDate |
1997-01-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85dd03ee381e9be577f731dd824e4c86
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_293b11bf616df18902423a8711f40be1 |
| publicationDate |
1997-10-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19700856-A1 |
| titleOfInvention |
Ion source for an ion beam system |
| abstract |
The ion source has an anode (106), a cathode (108) made of or coated with the same material as the specimen (104), to which ions are given off by the ion source (100), or made of a material representing no contamination for the specimen, and a closed plasma space (110) between the anode and cathode. The cathode has a multi-slotted structure (200) with adjacent slots separated by bridges and through which the ions pass to produce a multipath beam. A voltage is applied to the cathode or to the multi-slot structure to form an electric field perpendicular to the ion beam, whereby the bridges have opposite polarities, so as to extract and accelerate the multipath beam. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0921556-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0921556-A3 |
| priorityDate |
1996-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |