http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19650116-C1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-383 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-40 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01F1-48 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-38 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F15C5-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01F1-40 |
| filingDate | 1996-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 1998-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a890db878745c6d3834450589d2e8fe9 |
| publicationDate | 1998-04-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-19650116-C1 |
| titleOfInvention | Micromechanically manufactured flow restriction device |
| abstract | The system has a passage opening (12) formed in the first main surface of the substrate (10), with a duct (16) formed in a second main surface of the substrate, communicating fluidly with the passage opening, also with a diaphragm (22). One diaphragm electrode (26) at least is formed on the diaphragm. A cover system (30) is applied on the second main surface of the substrate, such that the diaphragm electrode together with the duct, define a flow resistance of the flow restriction system. The cover system has a counter electrode (32) which spaced at a distance from the diaphragm electrode, lies opposite the same. In such a manner that the diaphragm electrode and the counter electrode define a capacitive pressure pick-up. A passage opening is formed in the cover system, which has fluid communication with the duct. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19849700-C2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9155871-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6182941-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112129328-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19849700-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102015110711-A1 |
| priorityDate | 1996-12-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 27.