| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-285
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B5-001 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B5-00 |
| filingDate |
1996-10-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e771ae279b34ba249fdbda5058499c3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88f2a1183309afc5b6621ae55ce7b71f |
| publicationDate |
1997-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19641303-A1 |
| titleOfInvention |
Method for producing an optical element and an optical element thus produced |
| abstract |
Production of micro-structured optical elements from a dielectric interference layer structure, formed of dry etch resistant and dry etch sensitive optical interference layers, involves (a) forming the or each resistant layer from MgF2 as a stop layer (2) covering the entire element surface; (b) applying an optical layer structure of at least one sensitive layer as an optical functional layer (3, 4, 5) covering the entire element surface; and (c) removing regions of the functional layer down to the or each stop layer (2) by dry etching with a fluoride-containing etching gas using a photolithographic masking process. Also claimed is an optical element produced by the above method, in which two substrates treated as above are bonded with their coated sides facing one another using an optical cement such that the faces with the respective functional layers (3, 4) are at least partially exposed. Pref. the or each stop layer (2) is \-10 nm. thick. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2256526-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-2256526-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7564627-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004034419-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102004034419-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8158307-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1693839-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1693839-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19921190-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-1959276-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-03065085-A2 |
| priorityDate |
1995-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |