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filingDate 1996-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa52acbe186c3060d93ec658f125251e
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publicationDate 1997-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-19623517-C1
titleOfInvention MOS transistor for biotechnical applications
abstract The MOS transistor has a gate electrode conductively connected to a contact surface (pad). The pad is electrochemically corrosion resistant and dimensioned for connection to a living cell. The surface topology is relatively even and protected by a dielectric passivation layer apart from the portion containing the contact surfaces. The ratio of the gate width to the gate length is greater than 3 to 1. Polysilicon is provided between the gate electrode, contact surfaces and the electrically conductive connection. The polysilicon is silicised with a metal from the group titanium, tantalum, tungsten, cobalt, molybdenum, platinum and palladium.
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