| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a2bcaf91101a370a3d64e3190366357f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d3d699d128e0ab625dd41bee4397e08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a12b6a6e3b270e7b2776b46ed88b641 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-3137 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-271 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 |
| filingDate |
1995-12-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1999-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5164f765ffc67ee1a891d7540f5d166
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_acb4f664323d7fc1c7e9b44d13414c3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_922c6dbc54587d560cce9d0aac987973 |
| publicationDate |
1999-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19545050-C2 |
| titleOfInvention |
Method and device for depositing functional layers on a substrate by means of plasma-assisted layer deposition |
| priorityDate |
1994-12-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |