| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d92e31d7a888e78c621c7604a7f2969f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0206 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3408
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J9-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3426 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-56 |
| filingDate |
1995-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_505e287496463efaeed75d661658c0f0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c890819971372533f69a93d4b97812ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3c9ea69a455f90d58a46a0f27f56dc2 |
| publicationDate |
1997-05-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-19540794-A1 |
| titleOfInvention |
Device for coating a substrate from an electrically conductive target |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19741708-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19733940-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19733940-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-19813075-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-29717418-U1 |
| priorityDate |
1995-11-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |