| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-051
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-006
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S148-06 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B9-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate |
1968-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1973-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1771305-B2 |
| titleOfInvention |
Process for cleaning a treatment vessel made of quartz and used for the manufacture of semiconductors |
| priorityDate |
1968-05-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |