| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4172423b7d8dc0863584658aa07e91fa |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-58
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23F1-02 |
| filingDate |
1967-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d1ac77071d390c9354baaab853119b0a |
| publicationDate |
1970-12-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1622386-A1 |
| titleOfInvention |
Method of making a photomask |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5432976-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-S5419749-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-2365144-A1 |
| priorityDate |
1967-11-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |