| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c55bebddb4579da0335cff6794ea5c30 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3402 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-22 |
| filingDate |
1965-01-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31e1a5e35055f7c52b9b36fd6bf08fce |
| publicationDate |
1969-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1515297-A1 |
| titleOfInvention |
Process for the production of thin layers by means of gas discharge |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2856364-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-2750597-A1 |
| priorityDate |
1964-08-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |