| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3070783318d4f17db6ad97e418a5503 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02301 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02238 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C8-36
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
1963-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_70aa00422a20f3150f9462d2f5f27698
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc1af8553190397f96d8f249ad28ff4d |
| publicationDate |
1969-02-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1289382-B |
| titleOfInvention |
Process for the oxidation of a silicon semiconductor body |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-0016909-A1 |
| priorityDate |
1963-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |