| Predicate |
Object |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02381
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02532
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 |
| filingDate |
1964-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
1975-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1975-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-1240819-C2 |
| titleOfInvention |
PROCESS FOR MANUFACTURING HIGHLY PURE SEMICONDUCTOR MATERIAL FOR ELECTRONIC SEMICONDUCTOR PURPOSES |
| priorityDate |
1964-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |