Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1079 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3003 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76224 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-42392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66742 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7853 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66553 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66545 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66439 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-775 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2251 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-0673 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-6656 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-78 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786 |
filingDate |
2020-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d05f1f86d9fa7250567755f12c7d0d53 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ff5fdd76cb14e20e49589d29bc268ba http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_13d025559edc2387314189acef1872b3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7a0d4d27d1a2b59ae262b4bb505d8f08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aa65433cb020f284926f7bab91cbe17c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c16a65ceb9b10cdbc3a0845a4e90f0b0 |
publicationDate |
2021-08-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
DE-112020000199-T5 |
titleOfInvention |
Transistor channel with vertically stacked nanosheets, which are connected by fin-shaped bridge zones |
abstract |
A technique for providing a novel field effect transistor (FET) architecture that includes a central fin region and one or more vertically stacked nanosheets. A non-planar channel zone is formed which has a first semiconductor layer (208), a second semiconductor layer (206) and a fin-shaped bridge layer between the first semiconductor layer (208) and the second semiconductor layer (206). Forming the non-planar channel region may include forming a nanolayer stack over a substrate (204), forming a trench (502) by removing a portion of the nanolayer stack, and forming a third semiconductor layer (602) in the trench (502). Outer surfaces of the first semiconductor layer (208), the second semiconductor layer (206) and the fin-shaped bridge zone define an effective channel width of the non-planar channel zone. |
priorityDate |
2019-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |