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publicationDate 2020-11-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-112018004793-T5
titleOfInvention TARGET FOR PHYSICAL GAS PHASE DEPOSITION, NANOCOMPOSITE COATING FILM USING THE SAME, AND MANUFACTURING METHOD FOR IT
abstract The present invention provides a physical vapor deposition target, the target being formed of a Zr-Cu-Si based alloy to form a low friction coating film, the target being 82-90 atomic% Zr, 4-14 atom -% Cu and 4-8 atom% Si comprises.
priorityDate 2017-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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