http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112016004442-B4

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publicationDate 2021-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-112016004442-B4
titleOfInvention Process for bonding and debonding of handling devices for semiconductor dies and bonded semiconductor packages
abstract A method of processing semiconductor devices, the method comprising: Applying (102) a release layer (210) to a transparent handling device (204), Bonding at least one isolated semiconductor unit (202) to the transparent handling device, Housing (106) the at least one singulated semiconductor unit while it is bonded to the transparent handling device, Ablation (110) of the release layer by irradiating the release layer through the transparent handling device with a laser (214) and Removing (112) the at least one separated semiconductor unit from the transparent handling device after the release layer has been removed, wherein the release layer comprises at least one additional material and wherein the at least one additional material sets a frequency of an electromagnetic radiation absorption property of the release layer, wherein: the at least one additional material has a first additional material and a second additional material, the first additional material being a chemical absorber for a wavelength of 355 nm and the second additional material being a chemical absorber for one of several wavelengths in a range that 600 nm to 740 nm, and wherein the first and the second additional material are each thermally stable at a temperature of ≥ 250 ° C; or the at least one additional material is a chemical absorber for 355 nm in a phenoxy base material, or the at least one additive is 2,5-bis (2-benzimidazolyl) pyridine; or the at least one additional material is: where R is methylcyclohexane or n-butyl; or the at least one additional material is chemical absorbers for one of several wavelengths in a range comprising 600 nm to 740 nm and is completely soluble in cyclohexanone.
priorityDate 2015-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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