http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112016001087-B4

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filingDate 2016-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2023-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2023-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber DE-112016001087-B4
titleOfInvention Antireflection film and method of making same
abstract An antireflection film (3A) provided on the surface of a substrate (2), the film (3A) comprising: a surface layer (10) with an alumina hydrate as the main component, wherein the surface layer (10) has only an uneven structure in which the volume fraction of the alumina hydrate per unit volume decreases from the substrate side to the surface side, and the period of uneven structure of peaks distributed on the surface side is designed to be less than or equal to a wavelength of is light whose reflection is to be suppressed, and an adhesion layer (51) adhered to the substrate side of the surface layer (10) and provided of hydrogenated metal oxide, metal oxide or metal fluoride, wherein the thermal expansion coefficient of the adhesive layer (51) is in a range of 0.65 × 10 -6 to 19 × 10 -6 /K at a reference temperature of 25 ℃ and the refractive index difference between the adhesive layer (51) and the surface layer (10). at an interface is at least 0.2 and at most 1.15.
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