| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1dc81572668011f409ac27fe92772747 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B15-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-3414
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-185
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B23-08 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C14-44 |
| filingDate |
2015-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_279671f9d677828ef52bae79fcea0bb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_903a297f63d0cd76950fba90e19a2f2e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_35f6b775164a292bf10f98a38d9e4725
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9a77146d3f8143b341f40b32579694ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00e304adaf179f7c9f15a079407a6967
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5bbb7bc1bab29b97d34dd802bd3c3e99 |
| publicationDate |
2017-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112015006364-T5 |
| titleOfInvention |
A method of producing a copper thin film by using a single crystal copper target |
| abstract |
Disclosed is a method for producing a copper thin film using a single crystal copper target, and more particularly, a method for producing a copper thin film using a single crystal copper target in which a copper thin film is deposited on a sapphire sheet substrate by high frequency sputtering using a Czochralski grown single crystal copper target therefore show a high quality in terms of crystallinity. The method comprises depositing a copper thin film on a sapphire wafer substrate by a high frequency sputtering process using a disc-shaped single crystal copper target obtained by cutting Czochralski grown cylindrical single crystal copper. |
| priorityDate |
2015-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |