| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-325
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0755
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0751 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D5-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D183-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-075 |
| filingDate |
2014-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07307bb258ec7ebb2345c253704458b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6efbdd106e53689a924e0c0910d0d6bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b3ed342251ff51a1ef856de4fa962768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ad553b29014bb327125d4418292c2958
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_935983d7ab01435021cc8048e7b356b2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2294a97765a1ae8aeaba688bdc181f14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_524f3748e4756f0d4e10b278d6ff36c8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_37d31cdeeeebdec1aaf0f9cefdd61265 |
| publicationDate |
2018-09-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112014000485-B4 |
| titleOfInvention |
Silicon-containing antireflective coatings containing non-polymers silsesquioxanes |
| abstract |
An antireflective material comprising: a silicon-containing base polymer; a non-polymeric silsesquioxane material; anda photoacid generator (PAG), said non-polymeric silsesquioxane material comprising a polyhedral oligomeric silsesquioxane (POSS) having a hydrophilic pendant group protected with an acid labile function, said antireflective material containing 80-99% by weight of said silicon-containing base. Polymer and 0.5-10 weight percent of the material comprises a non-polymeric silsesquioxane. |
| priorityDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |