| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a665d61597c2731ab4130971ee397dc9 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-582 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08F26-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G81-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08B11-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2013-08-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31a01ed65d3160a50f378c84dfae8ccd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_523e5f0c7418f04134cf08ce1d859e56 |
| publicationDate |
2015-05-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112013004295-T5 |
| titleOfInvention |
Polishing composition and method of making a substrate |
| abstract |
A polishing composition comprises a water-soluble polymer having a weight average molecular weight of 1,000,000 or less and a molecular weight distribution represented by the weight average molecular weight (Mw) / number average molecular weight (Mn) of less than 5.0. The polishing composition used primarily in applications for polishing a substrate, preferably in applications for performing the fine polishing of the substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10344185-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102019123080-B4 |
| priorityDate |
2012-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |