| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-046
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B2562-028 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61B5-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N1-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/A61N1-36 |
| filingDate |
2012-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_67934a32c5f63720997c949aea36676d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9109b68b55594387713c374f294c46cb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_15570a8bea301f9960161a6b955454ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a5f69c3f59b08f18c724a24f7736558 |
| publicationDate |
2014-08-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112012004348-T5 |
| titleOfInvention |
Multi-electrode array of high density |
| abstract |
One method involves forming one or more channels (104) in a substrate (106); lining the one or more channels (104) with a dielectric liner (112); filling the one or more channels (104) with a conductive electrode (102) to form one or more channel electrodes (102); forming a transistor layer (108) on the substrate (106); connecting each of the one or more channel electrodes (102) to at least one access transistor (716) in the transistor layer (108) and thinning the substrate (106) to expose at least a portion of each of the channel electrodes (102). |
| priorityDate |
2011-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |