http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112012001891-T5
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee1c19da359446fb5c4f0458a57b783d |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-30625 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2012-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a52c78287772e6465bdc60e7a992b33 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a669e03acc73cdb36cf622559cb6a1e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_201e2b369eae41bfa2828b2ae71d4483 |
| publicationDate | 2014-01-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-112012001891-T5 |
| titleOfInvention | A method of polishing a non-oxide single crystal substrate |
| abstract | It is a polishing method for polishing a non-oxide single crystal substrate, such as. A silicon carbide single crystal substrate, provided at a high polishing speed, thereby obtaining a high quality surface which is smooth and has excellent surface properties. This polishing method is a method of supplying a polishing liquid to a polishing pad containing no abrasive grains so that a surface of the non-oxide single crystal substrate to be polished and the polishing pad are brought into contact with each other and polishing the surface to be polished by a relative movement between them, the method being characterized in that the polishing liquid comprises an oxidizing agent whose redox potential is 0.5 V or more and which contains a transition metal, and water and contains no abrasive grains. |
| priorityDate | 2011-04-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 56.