| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f96aa5fb688ac46af62a9c8bbdc3e970 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0237 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-066
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-09 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B17-02 |
| filingDate |
2012-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_47ad2fda1855ddfd5fd4a84a20913522 |
| publicationDate |
2013-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112012000663-T5 |
| titleOfInvention |
A method of determining a multilayer thin film deposition on a piezoelectric crystal |
| abstract |
A method for accurately calculating the thickness of deposited thin film layers on a piezoelectric crystal blank where dissimilar materials can be used, thereby enabling determinations in various applications using exotic materials. In addition, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. With the exact analytical solution, thickness errors are virtually eliminated when multiple layers of different materials are sequentially deposited on the same monitor quartz crystal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-102020100118-A1 |
| priorityDate |
2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |