| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a3d52eacd83e723ebd2ca61b598586c2 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-32182
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B2219-45031
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P90-02 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G05B19-41875 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00 |
| filingDate |
2011-06-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_406545cdd90a4d56f43f95c79641f071
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2af50941e796fb1d78ea480f56a19fe5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f3192df9cd268f01de20f483c209146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_51c2ddcd62662ca4e644c6a25c7dab0a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aac4092eafd584bce56af6c1f9cd6e15
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ab14a9887aabad4d3b72e2e36a1348a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_522a5c4d6259f94072f3d21c83cfdbeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_11380c1170e92a310b1826e6d38fbd1c |
| publicationDate |
2013-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
DE-112011102209-T5 |
| titleOfInvention |
Data corruption for a wafer inspection or metrology device |
| abstract |
Various embodiments are provided for determining parameters for wafer inspection and / or metrology. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019219669-A1 |
| priorityDate |
2010-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |