http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112011100610-T5
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2f72da104f6a63a3655de15ad4697112 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02562 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-541 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02422 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-0629 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-228 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02631 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate | 2011-02-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_89e09510a62fcd148a40a5491ed12d61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83f5ac50a843e1c4eed75378b8d981ff |
| publicationDate | 2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | DE-112011100610-T5 |
| titleOfInvention | Atmospheric pressure chemical vapor deposition with saturation control |
| abstract | There is disclosed a method of coating a substrate that is heated to a temperature below the condensation temperature of a semiconductor material at atmospheric pressure, the method comprising the steps of mixing a mass of semiconductor material and a heated inert gas stream, vaporizing the controlled mass of semiconductor material inert gas to produce an undersaturated fluid mixture, directing the subsaturated fluid mixture onto a substrate, wherein the substrate is at substantially atmospheric pressure, depositing a layer of semiconductor material on a surface of the substrate, extracting non-deposited semiconductor material, and Repeating the steps of generating, directing, depositing, and extracting to minimize a quantity of non-deposited semiconductor material. |
| priorityDate | 2010-02-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 31.